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静电造成微电子电路损伤的模式

发布时间:2014-5-10 17:10:23  点击量: 次

                    静电放电造成微电子电路损伤的模式金属布线与扩散区(或多晶)接触孔产生火花,使金属和硅的欧姆接触被破坏。

搜狐足彩  SHIJIEDIANDEWENDUCHAOGUOBANDAOTIGUIDERONGDIAN(1415℃)SHI,SHIGUIRONGJIE,CHANSHENGZAIJIEJING,ZAOCHENGQIJIANDUANLU。JINSHUHUADIANJIHEBUXIANRONGJIE、“QIUHUA”,ZAOCHENGDIANLUKAILU。DADIANLIULIUGUOPNJIECHANSHENGJIAOERRE,SHIJIEWENSHENGGAO,XINGCHENG“REBAN”HUO“REBEN”,DAOZHIQIJIANSUNHUAIJINGDIANFANGDIANYINFADESHUNSHIDADIANLIU(JINGDIANHUOHUA)YINRANYINBAOYIRAN、YIBAOQITIHUNHEWUHUODIANHUOGONGPIN,ZAOCHENGYIWAIRANSHAO、BAOZHASHIGU。

  JINGDIANFANGDIANSHIRENTIZAOSHOUDIANJIYINFACAOZUOSHIWUZAOCHENGERCISHIGU、JINGDIANCHANGDEKULUNLIZUOYONGSHIFANGZHI、YINSHUA、SULIAOBAOZHUANGDENGZIDONGHUASHENGCHANXIANSHOUZU。DISANLEIJINGDIANWEIHAISHIYOUYUJINGDIANFANGDIANDEDIANCIFUSHEHUOJINGDIANFANGDIANDIANCIMAICHONG(ESDEMP)DUIDIANZISHEBEIZAOCHENGDEDIANCIGANRAOYINFADEGEZHONGSHIGU。

  YIBANSHUOLAI,JINGDIANFANGDIANDOUSHIZAIWEIMIAOHUONAMIAOLIANGJIWANCHENGDE,YINCIZHEIYIGUOCHENGSHIYIZHONGJUEREGUOCHENG,FANGDIANSHUNJIANTONGGUOHUILUDEDADIANLIU,XINGCHENGJUBUDEGAOWENREYUAN。DUIWEIDIANZIQIJIANERYAN,QIJINGDIANFANGDIANNENGLIANGTONGGUOQIJIANJIZHONGSHIFANG,QIPINGJUNGONGLVKEDAJIQIANWA,RELIANGHENNANCONGGONGLVHAOSANMIANXIANGWAIKUOSAN,YINERZAIQIJIANNEIXINGCHENGDADEWENDUTIDU,ZAOCHENGJUBURESUNSHANG,DIANLUXINGNENGBIANHUAIHUOSHIXIAO。

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